Utility scripts for converting measurement coordinates between Cartesian (x, y) and polar (r, θ) systems, designed for wafer evaluation and multipoint recipe design workflows.
In wafer-level evaluation and metrology workflows, measurement tools may require different coordinate systems to define measurement points. Some tools use Cartesian coordinates (x, y), while others require polar coordinates (r, θ). This repository provides simple utility scripts to convert measurement points between these coordinate systems, allowing consistent alignment of multipoint measurement recipes across different tools.
This repository currently includes the following two coordinate conversion utilities:
- Cartesian to polar conversion
(x, y → r, θ) - Polar to Cartesian conversion
(r, θ → x, y)
Each utility is provided as a ZIP archive together with example input files. Users can extract the required ZIP file depending on their coordinate conversion needs and execute the script locally.
The following coordinate definition is used in this repository:
- θ = 0°: positive x-direction
- θ increases counter-clockwise (CCW)
- θ range: 0–360 degrees
- Aligning multipoint measurement locations across evaluation tools using different coordinate systems
- Designing and verifying multipoint measurement recipes for wafer-level characterization
- Preparing coordinate data for wafer map visualization or further data analysis
- Input data is provided as CSV files with headers
- Output data is generated as CSV files after conversion Example input formats are included in each ZIP archive.
- Floating-point rounding errors may occur; appropriate numerical precision should be considered depending on the application.
- This tool performs coordinate conversion only; it does not validate the physical feasibility of measurement locations on the wafer.
- numpy
- pandas
- Wafer-Heatmap-Tool (for spatial visualization of wafer data)